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Writing on Nanocrystals: Patterning Colloidal Inorganic Nanocrystal Films through Irradiation-Induced Chemical Transformations of Surface Ligands

机译:在纳米晶上书写:图案化胶体无机纳米晶   通过辐射诱导表面配体化学转化的薄膜

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摘要

In the past couple of decades, colloidal inorganic nanocrystals and, morespecifically, semiconductor quantum dots have emerged as crucial materials forthe development of nanoscience and nanotechnology, with applications in verydiverse areas such as optoelectronics and biotechnology. Films made ofinorganic NCs deposited on a substrate can be patterned by e-beam lithography,altering the structure of their capping ligands and thus allowing exposed areasto remain on the substrate while non-exposed areas are redispersed in asolvent, as in a standard lift-off process. This methodology can be describedas a direct lithography process, since the exposure is performed directly onthe material of interest, in contrast with conventional lithography which usesa polymeric resist as a mask for subsequent material deposition or etching. Afew reports from the late 1990 and early 2000 used such direct lithography tofabricate electrical wires from metallic NCs. However, the poor conductivityobtained through this process hindered the widespread use of the technique. Inthe early 2010, the same method was used to define fluorescent patterns on QDfilms, allowing for further applications in biosensing. For the past 2 ,3years, direct lithography on NC films with e-beams and X rays has gone throughan important development as it has been demonstrated that it can tune furthertransformations on the NCs, leading to more complex patternings and opening awhole new set of possible applications.
机译:在过去的几十年中,胶体无机纳米晶体,更具体地说是半导体量子点,已成为纳米科学和纳米技术发展的关键材料,并在光电子和生物技术等非常广泛的领域得到应用。可以通过电子束光刻对沉积在基材上的由无机NC制成的薄膜进行图案化,从而改变其封端配体的结构,从而使裸露的区域保留在基材上,而非裸露的区域则像标准剥离一样重新分散在溶剂中处理。与使用聚合物抗蚀剂作为掩模进行后续材料沉积或蚀刻的常规光刻相反,该方法可被描述为直接光刻工艺,因为曝光直接在目标材料上进行。 1990年代末和2000年代初的一些报道使用这种直接光刻技术来制造金属NC的电线。然而,通过该方法获得的差的导电性阻碍了该技术的广泛使用。在2010年初,使用相同的方法在QDfilms上定义了荧光图案,从而将其进一步应用于生物传感。在过去的2-3年中,对具有电子束和X射线的NC胶片进行直接光刻技术经历了重要的发展,因为事实证明,它可以调整NC上的进一步变形,从而导致更复杂的图案形成并为整个领域提供了新的可能应用程序。

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